Semiconductor Manufacturing Equipments
-
EB Evaporator -
EB Lithography -
ICP-RIE for GaN -
LED Transfer Equipment -
LP-CVD (poly-Si, SiN,SiO2) -
Deep-RIE -
XeF2 Dry Etching Equipment -
Asher Apparatus -
Sintering Furnace -
Plasma-Enhanced CVD -
Palylene Coater -
Blade Dicing Equipment -
Resist Spray Coater -
Reactive Ion Etching using F-based gas -
Wire Bonding Equipment -
Mask Aligner
Evaluation Tools
-
Probe Station -
Angle resolved PL or EL Evaluation System -
MicroPL System -
FE-SEM -
Stylus-type Step Profiler -
Electric Measuring Instrument