大電力パルススパッタ（HiPIMS）を用いたSnO2の低温結晶化に関する論文が掲載されました。
Kosuke Takenaka, Yuta Saito, Yuichi Setsuhara, Takayuki Ohta
High-power pulsed magnetron sputtering of crystalline SnO2 films: Relationship between peak power density, plasma kinetics, and chemical bonding states
Japanese Journal of Applied Physics, 65, 11SP16(2026).
https://doi.org/10.35848/1347-4065/ae6b90
