M学生がISCSI-VII / ISTDM 2016 で研究発表してきました

2016年6月11日

7th International Symposium on Control of Semiconductor Interfaces (ISCSI-VII)   / International SiGe Technology and Device Meeting (ISTDM 2016)

June 7-11, 2016

Noyori Conference Hall, Nagoya University

1. High accuracy non-contact Si substrate temperature measurement using optical low-coherence interferometry for controlling plasma processes