Publications/Awards

Awards

2020年7月

2020年 電気学会センサ・マイクロマシン部門 部門大会　第37回 「センサ・マイクロマシンと応用システム」シンポジウム 優秀技術論文賞

“構造が実現する巨大ハードスプリング効果を持つ赤外線センサむけ熱たわみ連成ねじり振動子岡本 真輝,  畠 垣 知弥, 熊谷慎也, 佐々木 実
2018年9月

応用物理学会 第40回（2018年度）応用物理学会論文賞

受賞者: 熊谷慎也, Chun-Yao Chang, Jonghyeon Jeong, 小林未明, 清水鉄司, 佐々木実
2016年3月

ISPlasma2016/ IC-PLANTS2016 Excellent Poster Presentation Award

受賞者: Yoshihiro Nakai, Hayato Suzumura, Shinya Kumagai, Minoru Sasaki
2013年11月

IEEE Best Paper Award in 2013 International symposium on Micro-NanoMechatronics and Human Science (MHS2013)

受賞者: Daisuke Momonoi, Tatsuya Yamazaki, Shinya Kumagai, Minoru Sasaki
2013年9月

応用物理学会 Poster Award

受賞者: 冨川　崇，熊谷慎也，山下一郎，浦岡行治，佐々木実
2013年11月

応用物理学会　集積化MEMS技術研究会 優秀論文賞

受賞者: 柄崎克樹 熊谷慎也 佐々木実
2010年11月

IEEE Best Paper Award in 2010 International symposium on Micro-NanoMechatronics and Human Science (MHS2010)

受賞者: K. Masuno, S. Kumagai, M. Sasaki
2008年8月

応用物理学会 第30回　JJAP 論文賞

受賞者: 山田聖人　吉井重雄　熊谷慎也　 藤原 勇　 西尾和晃　奥田充宏　 松川望　 山下一郎
2007年11月

日本表面科学会 技術賞 生体分子を用いた新しいナノ構造作製方法－バイオナノプロセス－

受賞者: 熊谷慎也　山下一郎
2006年9月
応用物理学会 講演奨励賞
受賞者: 熊谷慎也

Books

“Coordination chemistry in protein cages”, Wiley, (2013), ISBN:978-1-118-07857-0

Part 5. Applications in nanotechnology, 12. Nanoparticles Synthesized and Delivered by Protein in the Field of Nanotechnology Applications

Ichiro Yamashita, Kenji Iwahori, Bin Zheng, Shinya Kumagai

“バイオナノプロセス　溶液中でナノ構造を作るウェット・ナノテクノロジーの薦め”

シーエムシー出版　（2008） ISBN:978-4-88231-995-5

第21章　ナノ粒子の静電配置

熊谷慎也、吉井重雄、山下一郎

Original papers

  1. “Non-thermal atmospheric-pressure plasma exposure as a practical method for improvement of Brassica juncea seed germination“,Mime Kobayashi, Sho Yamaguchi, Shintaro Kusano, Shinya Kumagai, Toshiro Ito, Journal of Biotechnology 392, pp. 103-108 (2024); DOI 10.1016/j.jbiotec.2024.06.019
  2. “Microperfusion cell culture system for promoted cell growth using non-thermal atmospheric pressure plasma exposure”, Hayata Okino, Ryota Yamada, Shunta Muraki, Motonari Suzuki and Shinya Kumagai, Jpn. J. Appl. Phys 62, SG1043 (2023); DOI 10.35848/1347-4065/acc03c
  3. “Plasma-on-Chip: A microdevice for guiding cell fate”, Shinya Kumagai, Mime Kobayashi, Tetsuji Shimizu, Minoru Sasaki, JSAP Review 2022 2022年12月, https://doi.org/10.11470/jsaprev.220417
  4. “Non-thermal atmospheric-pressure plasma potentiates mesodermal differentiation of human induced pluripotent stem cells”, Mime Kobayashi, Kiichiro Tomoda, Hirofumi Morihara, Michio Asahi, Tetsuji Shimizu, Shinya Kumagai, Heliyon 8(12) e12009-e12009 2022年12月
  5. “A method for exfoliating AlGaN films from sapphire substrates using heated and pressurized water”, Eri Matsubara, Ryota Hasegawa, Toma Nishibayashi, Ayumu Yabutani, Ryoya Yamada, Yoshinori Imoto, Ryosuke Kondo, Sho Iwayama, Tetsuya Takeuchi, Satoshi Kamiyama, Kanako Shojiki, Shinya Kumagai, Hideto Miyake and Motoaki Iwaya, Applied Physics Express, 15, 116502 (2022)
  6. “プラズマオンチップ：細胞の運命を導くマイクロデバイス”, 熊谷 慎也, 小林 未明, 清水 鉄司, 佐々木 実, 応用物理　2022 年 91 巻 9 号 p. 548-552
  7. “Towards prevention and prediction of infectious diseases with virus sterilization using ultraviolet light and low-temperature plasma and bio-sensing devices for health and hygiene care”, Kumagai S, Nishigori C, Takeuchi T, Bruggeman P, Takashima K, Takahashi H, Kaneko T, Choi EH, Kambara M, Nakazato K, Ishikawa K.  (2022)  Japanese Journal of Applied Physics 61, SA0808.
  8. “Bipolar Electrostatic Driving of Isolated Micro-Resonator for Sensing High Voltage of Battery Output with Resolution”, N. Nobunaga, S. Kumagai, M. Sasaki, International Journal of Automation Technology, Vol.16 No.4 (2022) pp.464-470.
  9. “赤外線センサ向け静電ねじり振動子の共振周波数電気測定”, 畠垣 知弥, 熊谷 慎也, 佐々木 実, 電気学会論文誌Ｅ 141(7) 265-266 2021年7月
  10. “Patterning vertical sidewall for optical assembly”, Taichi Yamamoto, Hironori Kubo, Shinya Kumagai, Shigenori Saito, Fumitaka Sahara, Kenji Wasa, Minoru Sasaki, Journal of Optical Microsystems 1(02) 2021年3月9日
  11. “Respiration monitoring during 6-min walk using wearable sensor measuring capacitance built across skin”, Momoko Karita, Shinya Kumagai, Minoru Sasaki, Japanese Journal of Applied Physics 2021年
  12. “Plasma-on-Chip: device for non‐thermal atmospheric pressure plasma irradiation to single cells”, Shinya Kumagai, Mime Kobayashi, Tetsuji Shimizu, Minoru Sasaki, Electronics and Communications in Japan 103(9) 43-48 2020年9月
  13. “一細胞に非熱平衡プラズマを照射するPlasma-on-Chipデバイス：誘電体バリア放電方式による動作特性の改善”, 熊谷 慎也, 小林 未明, 清水 鉄司, 佐々木 実, 電気学会論文誌C 140(4) 452-456 2020年4月1日
  14. “Measurement of hydroxyl radicals delivered into liquid through a micro gas–liquid interface”, Koichi Ishikawa, Minoru Sasaki, Shinya Kumagai, Japanese Journal of Applied Physics 2020年1月1日
  15. “Effects of cold atmospheric plasma irradiation on Arabidopsis seedlings”, Mime Kobayashi, Yukun Wang, Shinya Kumagai, Yukiharu Uraoka, Toshiro Ito, Japanese Journal of Applied Physics 59, SAAB09, 2020年1月1日
  16. “Batch Fabrication of Nano-Gap Electrode Array Using Photo-Patterning and Resist UV-Curing”, Hai Minh Nguyen, Mako Kumeuchi, Shinya Kumagai, Kenji Ishikawa, Masaru Hori, Minoru Sasaki, IEEJ Transactions on Sensors and Micromachines 139(1) 27-28 2019年1月1日
  17. “MEMS Resonator-Based Insulated Voltage Sensor Withstanding Higher Voltage”, Yuuki Wada, Naoki Nobunaga, Shinya Kumagai, Hiroki Ishihara, Makoto Ishii, Minoru Sasaki, ELECTRICAL ENGINEERING IN JAPAN 203(1) 58-64 2018年4月
  18. “Respiratory Motion Sensor Measuring Capacitance Constructed across Skin in Daily Activities”, Makie Terazawa, Momoko Karita, Shinya Kumagai, Minoru Sasaki, Micromachines 9, (2018) 543 (8 pages).
  19. “Enhanced PlasmonicWavelength Selective Infrared Emission Combined with Microheater”, H. Ishihara, K. Masuno, M. Ishii, S. Kumagai, M. Sasaki, Materials 10, (2017) 1085 (8 pages); doi:10.3390/ma10091085
  20. “Lifted Bottom of Microfluidic Channel for Cell Absorption Spectroscopy Using Optical Fibers”, M. Yoshimi, S. Kumagai, Y. Ohishi, M. Sasaki, Sens. Mater. 29, (2017) pp. 273-280.
  21. “Plasma cell treatment device Plasma-on-Chip: Monitoring plasma-generated reactive species in microwells”, J.-S. Oh, S. Kojima, M. Sasaki, A. Hatta, S. Kumagai, Sci. Rep. 7, (2017) 41953 (11 pages).
  22. “Light-absorbent liquid immersion angled exposure for patterning 3D samples with vertical sidewalls”, S. Kumagai, H. Kubo, M. Sasaki, J. Micromech. Microeng. 27, (2017) 025016 (9 pages).
  23. “Direct plasma irradiation affects expression of RNAs in cultured mammalian cells”, M. Kobayashi, H. Tokaji, S. Kumagai, Appl. Phys. Exp. 9, (2016) 127001 (3 pages).
  24. “Liquid Immersion Angled Exposure for 3D Photolithography”, T. Hosono, S. Kumagai, M. Sasaki, 電気学会論文誌E 136, (2016) pp. 90-91.
  25. “Plasma-on-chip device for stable irradiation of cells cultured in media with a low-temperature atmospheric pressure plasma”, T. Okada, C.-Y. Chang, M. Kobayashi, T. Shimizu, M. Sasaki, S. Kumagai, Arch. Biochem. Biophys. 605, (2016) pp. 11-18.
  26. “Design of microplasma electrodes for plasma-on-chip devices”, C.-Y. Chang, M. Sasaki, S. Kumagai, G.-J. Wang, J. Appl. Phys. D 49, (2016) 155203 (8 pages).
  27. “Development of plasma-on-chip: Plasma treatment for individual cells cultured in media”, #S. Kumagai, C.-Y. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, Jpn. J. Appl. Phys. 55, (2016) 01AF01 (7 pages). #corresponding author
  28. “Frequency-response-based analysis of respiratory sensor measuring capacitance built across skin”, M. Terasawa, S. Kumagai, M. Sasaki, Jpn. J. Appl. Phys. 55, (2016) 04EM13 (6 pages).
  29. “Micromechanical IR thermal detector using torsional oscillation: Improvement of resonator profile for high sensitivity”, J.-H. Jeong, #S. Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki, Jpn. J. Appl. Phys. 54, (2015) 04DE07 (6 pages). #corresponding author
  30. “Thermocouples fabricated on trench sidewall in microfluidic channel bonded with film cover”, T. Yamaguchi, M. Shibata, S. Kumagai, M. Sasaki, Jpn. J. Appl. Phys. 54, (2015) 030219 (6 pages).
  31. “Effect of Shielding a Floating Electrode on the Power Efficiency of a Micro-plasma VUV Light Source”, R. Sato, D. Yasumatsu, S. Kumagai, M. Hori, M. Sasaki, 電気学会論文誌E, 135, (2015) pp. 114-115.
  32. “A microfluidic chip for generating reactive plasma at gas–gas interface formed in laminar flow”, M. Hashimoto, K. Tsukasaki, S. Kumagai, M. Sasaki, Jpn. J. Appl. Phys. 54, (2015) 01AA09 (5 pages).
  33. “Localized plasma irradiation through a micronozzle for individual cell treatment”, R. Shimane, S. Kumagai, H. Hashizume, T. Ohta, M. Ito, M. Hori, M. Sasaki, Jpn. J. Appl. Phys. 53, (2014) 11RB03 (5 pages).
  34. “An atmospheric pressure inductively coupled microplasma source of vacuum ultraviolet light”, R. Sato, D. Yasumatsu, S. Kumagai, K. Takeda, M. Hori, M. Sasaki, Sens. Act. A 215, (2014) pp.144-149.
  35. “A novel infrared detector using highly nonlinear twisting vibration”, T. Yamazaki, S. Ogawa, S. Kumagai, M. Sasaki, Sens. Act. A 212, (2014) pp. 165-172.
  36. “Improving the quality factor of polycrystalline Si thin-film micromechanical resonators by metal-induced lateral crystallization using biomineralized Ni nanoparticles”, #S. Kumagai, T. Tomikawa, S. Ogawa, I. Yamashita, Y. Uraoka, M. Sasaki, Appl. Phys. Lett. 103, (2013) 223103 (4 pages). #corresponding author
  37. “Non-Contact Voltage Measurement Using a Micro-Resonator”, S. Hasegawa, S. Kumagai, M. Sasaki, 電気学会論文誌E, 133 (2013) pp. 354-358.
  38. “Minimising plasma irradiation area by micronozzle device towards single-cell treatment”, R. Shimane, S. Kumagai, M. Hori, M. Sasaki, Micro Nano Lett. 7, (2012) pp. 1210-1212.
  39. “Characterisation of a carbon nanotube random network conjugated by semiconductor nanoparticles with defined nanometre-scaled gaps”, S. Kumagai, N. Okamoto, M. Kobayashi, I. Yamashita, Micro Nano Lett. 7, (2012) pp. 753-756.
  40. “Improving Crystallinity of Thin Si Film for Low-Energy-Loss Micro-/Nano-Electro Mechanical Systems Devices by Metal-Induced Lateral Crystallization Using Biomineralized Ni Nanoparticles” # S. Kumagai, H. Murase, S. Miyachi, N. Kojima, Y. Ohshita, M. Yamaguchi, I. Yamashita, Y. Uraoka, M. Sasaki, Jpn. J. Appl. Phys. 51, (2012) 11PA03. #corresponding author
  41. “Infrared collecting lens having millimeter-size diameter integrated with Si photo cell”, T. Aonuma, S. Kumagai, M. Sasaki, 電気学会論文誌 E Vol. 132, No. 5 (2012) pp.119-126.
  42. “Investigation of Optical Flatness of Stretched Membrane Drum-Type Micromirror”,　 K. Kumar, A. Hikita, S. Kumagai, M. Sasaki, J. Lightwave Technol. 30, (2012) pp.1377-1385.
  43. “Wireless Driving of a Micromirror Device by Electoromagnetic Excitation Tuned to Mechanical Resonance of Rotation”, S. Kumagai, N. Ohnishi, M. Sasaki, J. Adv. Mech. Design Syst. Manufactur. 6, (2012) pp. 179-188.
  44. “Photoresist Spray Coating Using a Shield Plate with an Aperture for Uniform Deposition onto Trench-Type Three-Dimensional Microdevice Structures”, S. Kumagai, N. Fukuda, H. Tajima, M. Sasaki, Jpn. J. Appl. Phys. 51, (2012) 02BL04 (5 pages).
  45. “Multiple-Height Microstructure Fabricated by Deep Reactive Ion Etching and Selective Ashing of Resist Layer Combined with Ultraviolet Curing”, S. Kumagai, A. Hikita, T. Iwamoto, T. Tomikawa, M. Hori, M. Sasaki, Jpn. J. Appl. Phys. 51, (2012) 01AB04 (6 pages).
  46. “Floating Wire for Enhancing Ignition of Atmospheric Pressure Inductively Coupled Microplasma”, S. Kumagai, H. Asano, M. Hori, M. Sasaki, Jpn. J. Appl. Phys. 51 (2012) 01AA01 (6 pages).
  47. “Novel Atmospheric Pressure Inductively Coupled Micro Plasma Source Using Floating Wire Electrode”, S. Kumagai, H. Matsuyama, Y. Yokoyama, M. Hori, M. Sasaki, Jpn. J. Appl. Phys. 50 (2011) 08JA02 (6 pages).
  48. “Flow Analysis of Photoresist Spray Coating towards Improving Coverage on Three-Dimensional Structures”, S. Kumagai, H. Tajima, M. Sasaki, Jpn. J. Appl. Phys. 50, (2011) 106501 (6 pages).
  49. “Enhanced Contrast of Wavelength-Selective Mid-Infrared Detectors Stable against Incident Angle and Temperature Changes”, K. Masuno, S. Kumagai, K. Tashiro, M. Sasaki, Jpn. J. Appl. Phys. 50, (2011) 037201 (7 pages).
  50. “Reflection-type wavelength-selective infrared emitter using surface plasmon polaritons”, K. Masuno, S. Kumagai, M. Sasaki, Opt. Lett. 36, (2011) pp. 376-388.
  51. “A water-soluble carbon nanotube network conjugated by nanoparticles with defined nanometre gap”, M. Kobayashi, S. Kumagai, B. Zheng, Y. Uraoka, T. Douglas, I. Yamashita, Chem. Commun. 47, (2011) pp. 3475-3477.
  52. “Contrast Enhancement of Wavelength-Selective Detection of Mid-Infrared Using Localized Atmospheric-Pressure Plasma Treatment”, K. Masuno, K. Tashiro, M. Hori, S. Kumagai, M. Sasaki, Jpn. J. Appl. Phys. 49, (2010) 04DL18 (6 pages).
  53. “Ferritin in the Field of Nano Device”, I. Yamashita, K. Iwahori, S. Kumagai, Biochim. Biophys. Act. 1800, (2010) pp. 846-857.
  54. “Position-Controlled Vertical Growths of Individual Carbon Nanotubes Using a Cage-Shaped Protein”, S. Kumagai, T. Ono, S. Yoshii, A. Kadotani, R. Tsukamoto, K. Nishio, M. Okuda, I. Yamashita, Appl. Phys. Exp. 3, (2010) 015101 (3 pages).
  55. “Electrostatic self-aligned placement of single nanodots by protein supramolecules”, S. Yoshii, S. Kumagai, K. Nishio, A. Kadotani, I. Yamashita, Appl. Phys. Lett. 95, (2009) 133702 (3 pages).
  56. “Self-Aligned Placement of Biologically Synthesized Coulomb Islands within Nanogap Electrodes for Single Electron Transistor” S. Kumagai, S. Yoshii, N. Matsukawa, K. Nishio, R. Tsukamoto, I. Yamashita, , Appl. Phys. Lett. 95, (2009) 133702 (3 pages).
  57. “Characteristics and Improved Design of Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device”, T. Aonuma, S. Kumagai, M. Sasaki, M. Tabata, K. Hane, Jpn. J. Appl. Phys. 48, (2009) 04C191 (6 pages).
  58. “バイオ分子の自己組織化を利用したナノ構造・パターン技術の進展と今後の展開”, 熊谷慎也,　山下一郎,　 電気学会誌 128, (2008) pp. 163-165.
  59. “Adsorption Properties of a Gold-Binding Peptide Assessed by its Attachment to a Recombinant Apoferritin Molecule”, Ishikawa, K. Yamada, S. Kumagai, K.-I. Sano, K. Shiba, I. Yamashita, M. Kobayashi, Applied Phys. Exp. 1, (2008) 034006 (3 pages).
  60. “Effects of Dot Density and Dot Size on Charge Injection Characteristics in Nanodot Array Produced by Protein Supramolecules”, K. Yamada, S. Yoshii, Kumagai, A. Miura, Y. Uraoka, T. Fuyuki, I. Yamashita, Jpn. J. Appl. Phys. 46, (2007) pp. 7549-7553.
  61. “Bionanodot monolayer array fabrication for nonvolatile memory application”, A. Miura, Y. Uraoka, T. Fuyuki, Kumagai, S. Yoshii, N. Matsukawa, I. Yamashita, Surf. Sci. 601, (2007) pp. L81-L85.
  62. “Low-damage fabrication of high aspect nanocolumns by using neutral beams and ferritin-iron-core mask”, Kubota, T. Baba, S. Saito, S. Yamasaki, S. Kumagai, T. Matsui, Y. Uraoka, T. Fuyuki, I. Yamashita and S. Samukawa, , J. Vac. Sci. Technol. B 25, (2007) pp. 760-766.
  63. “Electrostatic Placement of Nanodots onto Silicon Substrate Using Ferritin Protein Supramolecules with Control of Electrostatic Interaction in Solution”, S. Kumagai, S. Yoshii, K. Yamada, N. Matsukawa, K. Iwahori, I. Yamashita, Jpn. J. Appl. Phys. 45, (2006) pp. 8311-8316.
  64. “Electrostatic placement of single ferritin molecule”, S.Kumagai, S. Yoshii, K. Yamada, N. Matsukawa, I. Fujiwara, K. Iwahori, and I. Yamashita, Appl. Phys. Lett., 88, (2006) 153103 (3 pages).
  65. 「生体分子を用いた新しいナノ構造作製方法－バイオナノプロセス－」 熊谷慎也、　山下一郎,　表面科学　27, (2006) pp. 157-163.
  66. “Floating Gate Metal-Oxide-Semiconductor Capacitor Employing Array of High-Density Nanodots Produced by Protein Supramolecule”, K. Yamada, S. Yoshii, S. Kumagai, A. Miura, Y. Uraoka, T. Fuyuki, I. Yamashita, Jpn. J. Appl. Phys. 45, (2006) pp. 8946-8951.
  67. “High-Density and Highly Surface Selective Adsorption of Protein　Nanoparticle Complexes by Controlling Electrostatic Interaction”, K. Yamada, S. Yoshii, S. Kumagai, I. Fujiwara, K. Nishio, M. Okuda, N. Matsukawa, I. Yamashita, Jpn. J. Appl. Phys. 45, (2006) pp. 4259-4264.
  68. “Nanopatterning of Vapor-deposited Aminosilane Film using EB Lithography for Ferritin Protein Adsorption”, S. Kumagai, S. Yoshii, K. Yamada, I. Fujiwara, N. Matsukawa, I. Yamashita, J. Photopolym. Sci. Technol. 18, (2005) pp. 495-500.
  69. “Electron Emission from Indium Tin Oxide/Silicon Monoxide/Gold Structure”, M. H. Mourad, K. Totsu, S. Kumagai, S. Samukawa, M. Esashi, Jpn. J. Appl. Phys. 44, (2005) pp. 1414-1418.
  70. “Reactive Platinum-Manganese Etching using Pulse-Time-Modulate Chlorine Plasma and Post-Corrosion Treatment”, S. Kumagai, T. Shiraiwa, S. Samukawa, J. Vac. Sci. Technol. A 22, (2004) pp. 1093-1100.
  71. “Highly Anisotropic and Corrosionless PtMn Etching using Pulse-Time-Modulated Chlorine Plasma”, S. Samukawa, S. Kumagai, T. Shiraiwa, Jpn. J. Appl. Phys. 42, (2003) pp. L1272-L1274.
  72. “Estimation of dissociation degree of N2 in an inductively coupled plasma by vacuum ultraviolet emission spectroscopy”, T. Nakano, S. Kumagai, S. Samukawa, J. Appl. Phys. 92, (2002) pp. 2990-2995.
  73. “On-Wafer Monitoring of Vacuum-Ultraviolet Radiation Damage in High-Density Plasma Processes”, S. Samukawa, Y. Ishikawa, S. Kumagai, M. Okigawa, Jpn. J. Appl. Phys. 40, (2001) pp. L1346-L1348.
  74. “Chlorine molecular ions measured in time-modulated inductively coupled plasma by laser induced fluorescence technique”, S.  Kumagai, M. Sasaki, M. Koyanagi, K. Hane, Plasma Sources Sci. Technol. 10, (2001) pp. 205-210.
  75. “Dominance of Cl2+ or Cl+ ions in Time-Modulated Inductively Coupled Cl2 Plasma Investigated with Laser-Induced Fluorescence and Probe Measurement”, Kumagai, M. Sasaki, M. Koyanagi, K. Hane, Jpn. J. Appl. Phys. 39, (2000) pp. 6980-6984.
  76. “Laser-Induced Fluorescence Measurement of Chlorine Ion Temperature in Time-Modulated Inductively Coupled Plasma”, S.Kumagai, M. Sasaki, M. Koyanagi, K. Hane, J. Electrochem. Soc. 147, (2000) pp. 3070-3073.
  77. “Detection of Metastable Chlorine Ions in Time-Modulated Plasma by Time-Resolved Laser-Induced Fluorescence”, S. Kumagai, M. Sasaki, M. Koyanagi, K. Hane, Jpn. J. Appl. Phys. 38, (1999) pp. 7126-7130.

学会発表

【国際会議発表】

招待講演　9件

  1. “Plasma-on-Chip: A microdevice for direct plasma-irradiation to cultured cells”, Shinya Kumagai, 第31回日本MRS年次大会 国際シンポジウム プラズマライフサイエンス 2021年12月13日

  2. “プラズマオンチップ”, 熊谷慎也, 小林未明, 友田紀一郎, 呉準席, 清水鉄司, 佐々木実, 第68回 応用物理学会春季学術講演会,  2021年3月19日

  3. “Plasma-on-Chip: A microdevice for irradiating single cells with non-thermal atmospheric pressure plasma” S. Kumagai, M. Kobayashi, J.-S. Oh, T. Shimizu, M. Sasaki, 3rd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2019), Plasma Source

  4. “Irradiating single cells with cold atmospheric pressure plasma using a microdevice”, S. Kumagai, M. Kobayashi, T. Shimizu, M. Sasaki,12th AsianAsian-European International Conference on Plasma Surface Engineering (AEPSE2019)
  5. “Development of plasma-on-chip: Plasma treatment for individual cells cultured in media”, Shinya Kumagai, Chun-Yao Chang ,Jonghyeon Jeong, Mime Kobayashi, Tetsuji Shimizu,  Minoru Sasaki, The 79th JSAP Autumn Meeting, 2018
  6. “Placing Biomolecules/Cells on a Chip Opens up Fields of Healthcare Applications”,　S. Kumagai, The 3rd International Conference on Universal Village (UV2016), Nagoya Univ., Oct. 6-8 (2016).
  7. “Bio-Nano Crystallization of Amorphous Si Thin Film for MEMS Devices”, S. Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki, The 15th International Meeting on Information Display (iMiD 2015), Daegu, Korea, Aug. 18-21 (2015).
  8. “MEMS infrared approaches to detector based on nonlinear oscillation and wavelength selective emitter using surface plasmon polariton”, M. Sasaki, S. Kumagai, Photonics West 2014, San Francisco, USA, Feb. 1-6 (2014).
  9. “Larger grain size of poly Si confirmed by MEMS strain gauge”, S. Kumagai, The seventeenth international workshop on active-matrix flatpanel displays and devices, Tokyo Institute of Technology, Jul. 5-7 (2010).

一般講演 122件

  1. “Analysis of Cells Directly Irradiated with Cold Atmospheric Pressure Plasma”, Yuki Ogawa, Motonari Suzuki, Masafumi Ito and Shinya Kumagai, 14th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlsma2022) 15th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2022), 09P-32, Online, 2022.3.6-10.
  2. “Study on Dielectric Barrier Discharge Plasma Irradiation Conditions for the Measurement of Active Species Passing through Lipid Bilayers”, Yuto Ando, Shinya Kumagai, 14th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science (ISPlasma2022/IC-PLANTS2022)　 08P-27, Virtual conference, March 6-10, 2022.
  3. “Uniformity of the Introduction of Substance into Cells by Plasma at hte Micro Air-Liquid Interface”,Yuki Tsutsui, Motonari Suzuki, Shinya Kumagai, 14th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science (ISPlasma2022/IC-PLANTS2022)　 08P-26, Virtual conference, March 6-10, 2022.
  4. “Effects of Non-Thermal Atmospheric Pressure Plasma on Cell Membrane for Efficient Substance Intake”, T. Kitazaki, S. Kumagai, 13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlsma2021) 14th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2021), online, 2021.3.7-11.
  5. “Analysis of Plasma-Generated Hydroxyl Radical Delivered Area in Liquid Using Microdevice Structure”, Y. Niwa, Y. Matsui, S. Kumagai, 13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlsma2021) 14th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2021), online, 2021.3.7-11.
  6.  “Plasma-enhanced substance intake into cells using micro air-liquid interface”, Yuki Tsutsui, Motonari Suzuki, Shinya Kumagai, Interfinish 2020, September 6-8, 2021, Online.
  7. “OH radical mearment using a micro through-hole chip”, K. Ishikawa, M. Sasaki, S. Kumagai, ISPlasma2019/IC-PLANTS2019, Nagoya Institute of Technology, Nagoya, Japan, Mar. 17-21 (2019).
  8. “Plasma-on-Chip device: Direct Non-Thermal Atmospheric Pressure Plasma Irradiation to Cells Cultured in Microwells”, S. Kumagai, M. Kobayashi, T. Shimzu, M. Sasaki, MRS-J, Kokura, Japan, Dec. 18-20 (2018).
  9. “Visualization of in-liquid hydroxyl radicals generated by atmospheric pressure plasma jet”, K. Ishikawa, M. Sasaki, S. Kumagai, International Symposium on Dry Process, Nagoya, Japan, Nov. 13-15 (2018).
  10. “Optofluidic Device for Measuring Cell Response Against Mechanical Stimulation”, M. Yoshimi, S. Kumagai, Y. Ohishi, M. Sasaki, 2018 International Conference on Solid State Devices and Materials (SSDM2018), Tokyo, Japan, Sep.9-13 (2018).
  11. “Plasma-on-Chip: An innovative microdevice towards cell fate control using a non-thermal atmospheric pressure plasma”, S. Kumagai, M. Kobayashi, J.-S. Oh, T. Shimizu, M. Sasaki, 10th International Symposium on Organic Molecular Electronics (ISOME2018), Tosu, Saga, Japan, May 31 – Jun. 2 (2018).
  12. “Measurement of plasma-generated reactive oxygen/nitrogen species in liquid delivered via a micro-through-hole”, J.-S. Oh, K. Ishikawa, M. Sasaki, S. Kumagai, 2nd International Workshop on Plasma Agriculture (IWOPA2), Mar. 9-11 (2018).
  13. “Visualization of Plasma-generated Reactive Species Delivered in Liquid via a Micro Through-hole”, K. Ishikawa, M. Sasaki, S. Kumagai, ISPlasma2018/IC-PLANTS2018, Meijo Univ. Nagoya, Japan, Mar. 4-8 (2018).
  14. “Processing thin-film membrane and dry etching release of torsional resonatore for uncooled infrared sensor”, T. Hatagaki, S. Kumagai, M. Sasaki, ISPlasma2018/IC-PLANTS2018, Meijo Univ. Nagoya, Japan, Mar. 4-8 (2018).
  15. “A micro through-hole chip device for analyzing plasma-irradiation effects on proliferation of cells cultured in liquid media”, Y. Nakanishi, M. Kobayashi, Kumagai, M. Sasaki, 2017 International Conference on Solid State Devices and Materials (SSDM2017), Sendai, Japan, Sep. 19-21 (2017).
  16. “Respiratory Sensor Continuously Attached on the Abdomen”, M. Terasawa, M. Karita, Kumagai, M. Sasaki, 2017 International Conference on Solid State Devices and Materials (SSDM2017), Sendai, Japan, Sep. 19-21 (2017).
  17. “A MICRO CELL WAGON DEVICE FOR INDIVIDUAL TREATMENT USING NON-THERMAL ATMOSPHERIC PRESSURE PLASMA”, K. Tsukasaki, Kumagai, M. Sasaki, The 19th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers 2017), Kaoshing, Taiwan, Jun. 19-22 (2017)　口頭発表.
  18. “MULTI-STEPPED SPIRAL TRENCH WITH SMOOTHENED SCALLOP TO DEPOSIT SUPERCONDUCTING MATERIALFOR ENERGY STORAGE”, C.-W. Hsu, Kumagai, Y. Suzuki, T. Hioki, T. Motohiro, M. Sasaki, The 19th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers 2017), Kaohsiung, Taiwan, Jun. 18-22 (2017)　口頭発表.
  19. “Analysis of Plasma-Generated Reactive Species in Liquid”, Y. Nakanishi, Kumagai, M. Sasaki, ISPlasma2017/IC-PLANTS2017, Chubu Univ., Mar. 1-5 (2017). 口頭発表.
  20. “Multi-Stepped Silicon Micro-Trenches with Smooth Sidewalls to Deposit Superconducting Material for Magnetic Energy Storage”, C.-W. Hsu, Kumagai, Y. Suzuki, T. Hioki, T. Motohiro, M. Sasaki, ISPlasma2017/IC-PLANTS2017, Chubu Univ., Mar. 1-5 (2017). 口頭発表.
  21. “BIPOLAR ELECTROSTATIC DRIVING FOR HIGH-RESOLUTION ISOLATED BATTERRY VOLTAGE SENSOR”, N. Nobunaga, Kumagai, H. Ishihara, M. Ishii, M. Sasaki, MEMS 2017, Las Vegas, USA, Jan. 22-26 (2017).
  22. “Plasma-on-Chip Device: Plasma Treatment for Cells in Microwells”, T. Okada, K. Ishikawa, M. Kobayashi, T. Shimizu, M. Sasaki, Kumagai, KJF-ICOMEP 2016, Fukuoka, Sep. 4-7 (2016).
  23. “Plasma-on-Chip: Evidence of Reactive Species Through Through-Holes”, J.-S.Oh, S. Kojima, A. Hatta, M. Sasaki, Kumagai, ISPlasma2016/IC-PLANTS2016, Nagoya Univ., Mar. 6-10 (2016) 口頭発表.
  24. “Gas-Sealed Inductively Coupled Plasma VUV Light Source”, Y. Nakai, H. Suzumura, Kumagai, M. Sasaki, ISPlasma2016/IC-PLANTS2016, Nagoya Univ., Mar. 6-10 (2016).
  25. “Wearable Capacitive Respiratory Sensor for Long Term Measurement”, S. K. Kundu, Kumagai, M. Sasaki, ISPlasma2016/IC-PLANTS2016, Nagoya Univ., Mar. 6-10 (2016) 口頭発表.
  26. “Plasma-on-chip device for analyzing interactions between plasma gas and individual cells”, C.-H. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, Kumagai, The International Chemical Congress of Pacific Basin Societies 2015 (Pacifichem 2015), Honolulu, USA, Dec 15-20 (2015) 口頭発表.
  27. “Temperature-Lowered Plasma Treatment by Controlling Direction of Supplying Reactive Species for Biological Application”, Y. Nakayama, Kumagai, H. Hazhizume, T. Ohta, M. Ito, M. Hori, M. Sasaki, 2015 International Conference on Solid State Devices and Materials (SSDM2015), Sapporo, Sep. 27-30 (2015).
  28. “Respiratory Sensor Measuring Capacitance Constructed Across Skin”, M. Terasawa, Kumagai, M. Sasaki, 2015 International Conference on Solid State Devices and Materials (SSDM2015), Sapporo, Sep. 27-30 (2015) 口頭発表.
  29. “Irradiating Cells Cultured in Microwells with Low-Temperature Atmospheric Pressure Plasma”, C.-H. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, Kumagai, The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015), Jeju, Korea, Sep. 20-24 (2015) 口頭発表.
  30. “Resonant Floating Electrode in Inductively Coupled Micro-Plasma Source for Power Efficiency”, K. Tsukasaki, D. Yasumatsu, Kumagai, K. Takeda, M. Hori, M. Sasaki, The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015), Jeju, Korea, Sep. 20-24 (2015) 口頭発表.
  31. “POWER EFFICIENT MICROHEATERFOR WAVELENGTH SELECTIVE INFRARED EMITTER AND CO2 GAS SENSING”, H. Ishihara, K. Masuno, M. Ishii, Kumagai, M. Sasaki, The 18th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers 2015), Alaska, USA, Jun. 21-25 (2015) 口頭発表.
  32. “CHARACTERIZATION OF VIBRATION-TYPE INFRARED THERMAL DETECTOR ON TEMPERATURE, LIGHT, AND THERMAL INFRARED”, J.-H. Jeong, Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki, The 18th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers 2015), Alaska, USA, Alaska, USA, Jun. 21-25 (2015).
  33. “IRRADIATING LOW-TEMPERATURE ATMOSPHERIC PRESSURE PLASMA TO CELLS USING MEMS NOZZLE”, Y. Nakayama, R. Shimane, Kumagai, H. Hashizume, T. Ohta, M. Ito, M. Hori, M. Sasaki, The 18th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers 2015), Alaska, USA, Alaska, USA, Jun. 21-25 (2015).
  34. “Collecting biological samples for accurate optical absorption spectroscopy”, Y. Matsuura, Kumagai, D. Deng, Y. Ohishi, M. Sasaki, Eighth International Conference on Molecular Electronics and Bioelectronics (M&BE8), Tokyo, Jun. 22-24 (2015).
  35. “DESIGNING POSITIONS OF GRAIN BOUNDARIES IN Si THIN-FILM FOR LOW-ENERGY-LOSS OPTICAL MEMS/NEMS DEVICES”, T. Tomikawa, J.-H. Jeong, Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki, 2014 Interrnational Conference on Optical MEMS and Nanophotonics, Glasgow, Scotland, Aug. 17-21 (2014). 口頭発表.
  36. “VIBRATIONAL IR MEMS SENSOR: APPLICATION OF TORSION-BARS TENSION-ENHANCED BY BIO-NANO CRYSTALLIZATION FOR HIGHLY SENSITIVE DETECTION”, J.-H. Jeong, Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki, 2014 Interrnational Conference on Optical MEMS and Nanophotonics, Glasgow, Scotland, Aug. 17-21 (2014).
  37. “SHIELD EFFECT OF FLOATING ELECTRODE FOR POWER EFFICIENT MICRO-PLASMA VUV LIGHT SOURCE”, R. Sato, D. Yasumatsu, Kumagai, M. Hori, M. Sasaki, 2014 Interrnational Conference on Optical MEMS and Nanophotonics, Glasgow, Scotland, Aug. 17-21 (2014).
  38. “MEMS Nozzle for Localized Irradiation of Atmospheric Pressure Plasma Trapping Micro-Samples” R. Shimane, Kumagai, H. Hashizume, T. Ohta, M. Ito, M. Hori, M. Sasaki, ISPlasma 2014 / IC-PLANTS 2014, Meijo Univ. Mar. 2-6 (2014) 口頭発表.
  39. “Delay Masking Process Using UV Cured Resist Layer Combined with Deep Reactive Ion Etching for Multiple Height Microstructures”, R. Sato, T. Sawada, Kumagai, M. Sasaki, ISPlasma 2014 / IC-PLANTS 2014, Meijo Univ. Mar. 2-6 (2014).
  40. “Length Effect of Floating Wire Electrode In Transportable 144mHz Inductively Coupled Micro-Plasma Source”, D. Yasumatsu, H. Matsuyama, Kumagai, K. Takeda, M. Hori, M. Sasaki, ISPlasma 2014 / IC-PLANTS 2014, Meijo Univ. Mar. 2-6 (2014).
  41. “A Micro Plasma Reactor Chip: Using Interface in Micro-/Nano-Channels towards Materials Processing”, M. Hashimoto, R. Sato, Kumagai, M. Sasaki, IEEE 2013 Nanotechnology Materials and Devices Conference (NMDC 2013) Tainan, Taiwan, Oct. 6-9 (2013) 口頭発表.
  42. “A Thermocouple Device Fabricated on Trench Sidewall for Measuring Accurate Temperature of Microfluid”, T, Yamaguchi, Kumagai, M. Sasaki, 2013 International Conference on Solid State Devices and Materials (SSDM2013) Fukuoka, Sep. 25-27 (2013).
  43. “Microfluidic Device with Accurately Aligned Optical Fibers for Measuring Transmission Spectrum Using Supercontinuum Light”, H. Iimura, D. Deng, Kumagai, Y. Ohishi, m. Sasaki, 2013 International Conference on Solid State Devices and Materials (SSDM2013) Fukuoka, Sep. 25-27 (2013) 口頭発表.
  44. “Localized Plasma Treatment for Individual Cells”, R. Shimane, Kumagai, M. Hori, M. Sasaki, 2013 International Conference on Solid State Devices and Materials (SSDM2013) Fukuoka, Sep. 25-27 (2013) 口頭発表.
  45. “AN INFRARED DETECTOR BASED ON NONLINEAR OSCILLATION”, D. Momonoi, T. Yamazaki, Kumagai, M. Sasaki, Optical MEMS and Nanophotonics 2013, Kanazawa, Aug. 18-22 (2013).
  46. “INFRARED COLLECTING MICROLENS INTEGRATED WITH Si PHOTO CELL”, T. Aonuma, Kumagai, M. Sasaki, Optical MEMS and Nanophotonics 2013, Kanazawa, Aug. 18-22 (2013).
  47. “SURFACE PLASMON POLARITON BASED WAVELENGTH SELECTIVE IR EMITTER COMBINED WITH MICROHEATER”, T. Sawada, K. Masuno, S, Kumagai, M. Ishii, S. Uematsu, M. Sasaki, Optical MEMS and Nanophotonics 2013, Kanazawa, Aug. 18-22 (2013).
  48. “A MICROPLASMA CHIP FOR RADICAL MONITOR”, R. Sato, D. Yasumatsu, Kumagai, M. Hori, M. Sasaki, Optical MEMS and Nanophotonics 2013, Kanazawa, Aug. 18-22 (2013) 口頭発表.
  49. “MICRO-CHANNEL DEVICE FOR SPECTRUM MEASUREMENT USING OPTICAL FIBER ALIGNED WITH BIAS SPRING WITH REVERSELY TAPERED PROFILE”, H. Iimura, D. Deng, Kumagai, Y. Ohishi, M. Sasaki, Optical MEMS and Nanophotonics 2013, Kanazawa, Aug. 18-22 (2013).
  50. “Excluding grain boundaries from thin Si Film MEMS/NEMS devices”, T. Tomikawa, Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki, The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013) & Eurosensors XXVII, Barcelona, Spain, Jun. 16-20 (2013).
  51. “Isolated voltage sensing using micro-resonator”, N. Nobunaga, S. Hasegawa, Kumagai, K. Masuno, M. Ishii, S. Uematsu, M. Sasaki, The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013) & Eurosensors XXVII, Barcelona, Spain, Jun. 16-20 (2013).
  52. “A novel infrared detector using nonlinear vibration for high sensitivity”, T. Yamazaki, S. Ogawa, Kumagai, M. Sasaki, The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013) & Eurosensors XXVII, Barcelona, Spain, Jun. 16-20 (2013).
  53. “A microplasma chip for VUV light source”, R. Sato, D. Yasumatsu, Kumagai, M. Hori, M. Sasaki, MEMS 2013, Taipei, Taiwan, Jan. 20-24, 2013.
  54. “MEMS plasma VUV light source”, R. Sato, Kumagai, M. Hori, M. Sasaki, ISPlasma2012, Nagoya Univ. Jun. 28 – Feb. 1 (2013).
  55. “VUV emission from transportable micro plasma light source system”, D. Yasumatsu, H. Matsuyama, Kumagai, K. Takeda, M. Hori, M. Sasaki, ISPlasma2013, Nagoya Univ. Jun. 28 – Feb. 1 (2013).
  56. “3D wiring of vertically etched photo cell islands high voltage generation”, T. Yamamoto, Kumagai, M. Sasaki, ISPlasma2012, Nagoya Univ. Jun. 28 – Feb. 1 (2013).
  57. “3-D Wiring across vertical sidewalls of Si photo cells for series connection and high voltage generation”, Kumagai, T. Yamamoto, H. Kubo, M. Sasaki, MEMS 2012, Paris, France, Jun. 29 – Feb. 2 (2012) 口頭発表.
  58. “Micromachining techniques for wider variety of 3D devices”, M. Sasaki, Kumagai, The 25th International Microprocesses and Nanotechnology Conference (MNC 2012), Kobe, Nov. 4-7 (2012).
  59. “Micro-Oscillator for Non-Contact Voltage Sensing”, S. Hasegawa, Kumagai, M. Sasaki, the 19th International Display Workshops (IDW 2012), Kyoto, Dec. 4-6 (2012).
  60. “Selective Ashing of One Resist Layer Combined with UV Curing”, Kumagai, Tatsuki Wajima, Yukio Takeuchi, Minoru Sasaki, 11th Asia Pacific Conference on Plasma Science and Technology (APCPST), Kyoto, Oct. 2-5 (2012).
  61. “Self-Assembly Patterning of Nanomaterials using Electrostatic Interaction in Solution”, Kumagai, S. Yoshii, N. Okamoto, K. Nishio, I. Yamashita, IEEE Nanotechnology Materials and Devices Conference (IEEE-NMDC 2012), Honolulu, USA, Oct. 16-19 (2012).
  62. “Photoresist Spray Coating For 3D MEMS/NEMS”, Kumagai, T. Yamamoto, H. Kubo, M. Sasaki, IEEE Nanotechnology Materials and Devices Conference (IEEE-NMDC 2012), Honolulu, USA, Oct. 16-19 (2012) 口頭発表.
  63. “Controlling Crystallized Domain Positions in Poly-Si Film by using Ni Ferritin for Low Energy Loss and High Efficiency MEMS/NEMS Devices”, T. Tomikawa, S. Ogawa, Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki, the 2012 International Conference on Solid State Devices and Materials (SSDM2012), Kyoto, Sep. 25-27 (2012) 口頭発表.
  64. “Wearable Capacitive Breathing Sensor”, S. K. Kundu, Kumagai M. Sasaki, the 2012 International Conference on Solid State Devices and Materials (SSDM2012), Kyoto, Sep. 25-27 (2012).
  65. “Infra-Red Absorption Spectrum Measurement Combining Si Microfluidic Trench and Supercontinuum Light from Fiber”, S. Ohba, Kumagai, H. Kawashima, Y. Ohishi and M. Sasaki, the 2012 International Conference on Solid State Devices and Materials (SSDM2012), Kyoto, Sep. 25-27 (2012).
  66. “Analysis of Hard Spring Effect of Tense Poly-Si Torsion Bar of Micromirror”, S. K. Kundu, Kumagai, M. Fujishima, K. Hane, and M. Sasaki, 2012 IEEE Photonics Society International Conference on Optical MEMS & Nanophotonics (OMN 2012), Banff, Canada, Aug. 6-9 (2012).
  67. “Micro-Power Source of Si Photo Cells Connected across Vertical Sidewalls for Light Receiving and High Voltage Generation”, T. Yamamoto, H. Kubo, Kumagai and M. Sasaki, 2012 IEEE Photonics Society International Conference on Optical MEMS & Nanophotonics (OMN 2012), Banff, Canada, Aug. 6-9 (2012) 口頭発表.
  68. “A Spatial Light Modulator Fabricated with Bionano-Crystallized Poly-Si Film”, Kumagai, T. Tomikawa, S. Ogawa, S. Miyachi, I. Yamashita, Y. Uraoka, M. Sasaki, 2012 IEEE Photonics Society International Conference on Optical MEMS & Nanophotonics (OMN 2012), Banff, Canada, Aug. 6-9 (2012) 口頭発表.
  69. “Molecular Measurement Based on Infra-Red Absorption Spectrum Using Supercontinuum Light from Fiber”, S. Ohba, Kumagai, H. Kawashima, Y. Ohishi and M. Sasaki, 2012 IEEE Photonics Society International Conference on Optical MEMS & Nanophotonics (OMN 2012), Banff, Canada, Aug. 6-9 (2012).
  70. “A MICRO NOZZLE DEVICE TOWARDS PLASMA TREATMENT OF A CELL”, R. Shimane, Kumagai, M. Hori, M. Sasaki, The 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2012), Nanjing, China, Jul. 8-11 (2012) 口頭発表.
  71. “SURFACE FLATNESS OF DRUM-TYPE AND COLUMN-TYPE MICROMIRRORS IN STATIC AND DYNAMIC CONDITIONS”, S. K. Kundu, A. Hikita, Kumagai, M. Sasaki, The 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2012), Nanjing, China, Jul. 8-11 (2012).
  72. “Controlling Crystallization Structures in Si Thin Film for Improving Characteristics of MEMS Resonator”, Kumagai, H. Murase, T. Tomikawa, S. Ogawa, I. Yamashita, Y. Uraoka, M. Sasaki, 2012 MRS Spring Meeting, San Francisco, USA, Apr. 9-13 (2012) 口頭発表.
  73. “Improving Photoresist Spray Coating on 3D Structures for Microfludic Devices”, Kumagai, N. Fukuda, H. Tajima, M. Sasaki, 2012 MRS Spring Meeting, San Francisco, USA, Apr. 9-13 (2012).
  74. “Transportable micro plasma light source system”, H. Matsuyama, Kumagai, K. Takeda, N. Ebiduka, H. Hori, M. Sasaki, 5th International Conference on PLAsma-Nano Technology and Science (IC-PLANTS 2012), Inuyama, Mar. 9-10 (2012).
  75. “A Carbon Nanotube Network Conjugated by Semiconductor Nanoparticles with Defined Nanometer-Scaled Gaps”, Kumagai, N. Okamoto, M. Kobayashi, I. Yamashita, 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto Univ., Mar. 5-8 (2012) 口頭発表.
  76. “Ignition characteristic of micro plasma using floating electrode partially exposed inside gas channel”, R. Sato, H. Asano, Kumagai, M. Sasaki, 4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, (ISPlasma 2012), Chubu Univeristy, Mar. 4-8, 2012
  77. “Grating profile control for plasmonic thermal emitter using plasma etching”, T. Sawada, Kumagai, M. Sasaki, 4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, (ISPlasma 2012), Chubu Univeristy, Mar. 4-8, 2012
  78. “Multi-wavelength Selective IR Emitter Using Surface Plasmon Polaritons for CO2 Gas Sensing”, T. Sawada, K. Masuno, Kumagai, M. Sasaki, International Workshop on Micro/Nano-Engineering, ROHM PLAZA, Kyoto Univ., Dec.17-18 (2011).
  79. “MEMS resonator Improved by Controlling Generation of Crystallization Nuclei in Si Thin Film Structure”, Kumagai, H. Murase, S. miyachi, I. Yamashita, Y. Uraoka, M. Sasaki, The 18th International Display Workshops (IDW ‘11), Nagoya, Dec. 7-9 (2011) 口頭発表.
  80. “Evaluation of Stress Concentration and Deformation of Drum-type Micromirror”, S. K. Kundu, A. Hikita, Kumagai, M. Sasaki, The 18th International Display Workshops (IDW ‘11), Nagoya, Dec. 7-9 (2011) 口頭発表.
  81. “Extending Rotation Range of Spatial Light Modulator by Metal-Induced Lateral Crystallization of Amorphous Si Using Ni Ferritin Molecules”, Kumagai, S. Miyachi, H. Murase, I. Yamashita, Y. Uraoka, M. Sasaki, the 2011 International Conference on Solid State Devices and Materials (SSDM 2011), Nagoya, Sep. 28-30 (2011).
  82. “Carbon Nanotube Network Conjugated by Nanoparticles with Defined Nanometer-Scaled Gaps”, M. Kobayashi, Kumagai, K. Shiba, Y. Uraoka, M. Sasaki, the 2011 International Conference on Solid State Devices and Materials (SSDM 2011), Nagoya, Sep. 28-30 (2011).
  83. “Photoresist Spray Coating Using Aperture toward Trench-type 3D Microdevices”, N. Fukuda, Kumagai, M. Sasaki, the 2011 International Conference on Solid State Devices and Materials (SSDM 2011), Nagoya, Sep. 28-30 (2011).
  84. “INDIRECT WAVELENGTH SELECTIVE INFRARED EMITTER USING SURFACE PLASMON POLARITON”, K. Masuno, T. Sawada, Kumagai, M. Sasaki, The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers ’11, Beijing, China
  85. “BIONANO CRYSTALLIZED POLY-SI FILM FOR INCREASING TENSILE STRESS IN MEMS/NEMS DEVICE STRUCTURES”, Kumgai, S. Miyachi, I. Yamashita, Y. Uraoka, M. Sasaki, The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers ’11, Beijing, China, Jun. 5-9 (2011) 口頭発表.
  86. “INDIRECT WAVELENGTH SELECTIVE INFRARED EMITTER USING SURFACE PLASMON PORALITON”, K. Masuno, T. Sawada, Kumagai, M. Sasaki, The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers ’11, Beijing, China, Jun. 5-9 (2011).
  87. “Wireless Driving of a Micromirror through Electromagnetic Induction”, Kumagai, N. Ohnishi, M. Sasaki, The 4th International Conference on Manufacturing, Machine Design and Tribology, Gamagori, Aichi, Japan, Apr. 24-27 (2011).
  88. “Light-Weighted Micromirror Fabricated Using Stacked Photoresist Masks Realized by UV Curing”, A. Hikita, T. Iwamoto, Kumagai, and M. Sasaki, The 4th International Conference on Plasma-Nano Technology & Science, (IC-PLANTS 2011), Takayama, Mar. 10-12 (2011)
  89. “Characteristics of Floating Metal Wire in Micro Plasma Using Spiral Coil”, H. Asano, Kumagai, M. Sasaki, 3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, (ISPlasma 2011), Nagoya Institute of Technology, Mar. 3-6 (2011).
  90. “Ignition Characteristics of Planer Micro-plasma Source Using Floating Sheet Electrode”, Y. Yokoyama, H. Matsuyama, Kumagai, M. Sasaki, 3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, (ISPlasma 2011), Nagoya Institute of Technology, Mar. 3-6 (2011).
  91. “Multiple-height Microstructure Fabricated by ICP-RIE and Masking Layers Using Only Photoresists”, A. Hikita, T. Iwamoto, Kumagai, M. Sasaki, 3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, (ISPlasma 2011), Nagoya Institute of Technology, Mar. 3-6 (2011).
  92. “Increasing tensile stress in poly-Si film structure by metal-induced lateral crystallization using ferritin supramolecules with Ni nanoparticles”, Kumagai, S. Miyachi, I. Yamashita, Y. Uraoka, and M. Sasaki, The International Chemical Congress of Pacific Basin Societies, Honolulu, Hawaii, USA, Dec. 12-20 (2010) 口頭発表.
  93. “Synthesizing bio-nano conjugate of carbon nanotubes and Co nanoparticles toward new emerging nanodevices”, I. Yamashita, M. Kobayashi, Kumagai, The International Chemical Congress of Pacific Basin Societies, Honolulu, Hawaii, USA, Dec. 12-20 (2010) 口頭発表.
  94. “Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror”, S. Ogawa, Kumagai, M. Sasaki, the 17th International Display Workshops (IDW 2010), Hakata, Dec. 2 (2010).
  95. “Atmospheric Pressure Micro Inductively Coupled Plasma Source with Floating Electrode”, Kumagai, H. Matsuyama, M. Hori, Minoru Sasaki, Bulletin of American Physical Society, 63rd Gaseous Electronics Conference & 7th International Conference on Reactive Plasmas, Paris, France, Oct. 4-8 (2010).
  96. “Atmospheric Pressure Micro Inductively Coupled Plasma Light Source towards Portable Spectrometry System” Kumagai, H. Matsuyama, M. Hori, M. Sasaki, the 2010 International Conference on Solid State Devices and Materials (SSDM 2010), Tokyo, Sep. 22-24 (2010) 口頭発表.
  97. “Controlled Thermal Emission of Narrow-band IR Waves for Downsizing Sensor Module”, K. Masuno, Kumagai, M. Sasaki, the 2010 International Conference on Solid State Devices and Materials (SSDM 2010), Tokyo, Sep. 22-24 (2010) 口頭発表.
  98. “Atmospheric Pressure Plasma for Localized Material Deposition on IR Sensor”, K. Masuno, K. Tashiro, M. Hori, Kumagai, M. Sasaki, 2nd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, (ISPlasma 2010), Meijo Univeristy, Mar. 7-10 (2010).
  99. “Thermopile IR Detector Integrated with Wavelength Selective Filter Stable against Temperature and Incident Angle Change”, K. Masuno, Kumagai, M. Sasaki, K. Tashiro, the 2009 International Conference on Solid State Devices and Materials (SSDM 2009), Sendai, Oct. 7-9 (2009).
  100. “Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror”, M. Sasaki, Kumagai, M. Fujishima, K. Hane, H. Miura, the 2009 International Conference on Solid State Devices and Materials (SSDM 2009), Sendai, Oct. 7-9 (2009).
  101. “Absorbent liquid immersion angled exposure for 3D Photolithography”, H. Kubo, Kumagai, M. Sasaki, 2010 IEEE International Conference on Optical MEMS and Nanophotonics (OMN 2010), Sapporo, Aug. 9-12.
  102. “Large-size Infrared Reflow Microlens Based on Stacked Layers”, T. Aonuma, Kumagai, M. Sasaki, 2010 IEEE International Conference on Optical MEMS and Nanophotonics (OMN 2010), Sapporo, Aug. 9-12.
  103. “Liquid Immersion Angled Exposure for 3D Photolithography”, M. Sasaki, T. Hosono, Kumagai, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (OMN 2009), Florida, USA, Aug. 16-21 (2009).
  104. “Wireless Driving of Micromirror Using Electromagnetic Induction”, M. Sasaki, N. Ohnishi, Kumagai, K. Hane, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (OMN 2009), Florida, USA, Aug. 16-21 (2009).
  105. “Micromirror realized by combined surface and bulk micromachining using isotropic and anisotropic Si etching”, M. Sasaki, Kumagai, K. Hane, First International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2009), Nagoya, Mar. 8-11 (2009).
  106. “Liquid immersion angled exposure technique for 3D photolithography”, T. Hosono, Kumagai, M. Sasaki, First International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2009), Nagoya, Mar. 8-11 (2009).
  107. “Combination of LOCOS process and plasma Si etching using delayed mask for integrating sensor inside micromirror”, Kumagai, T. Aonuma, M. Sasaki, M. Tabata, K. Hane, The 8th International Workshop of Advanced Plasma Processing and Diagnostics Joint Workshop with Plasma Application Monodzukuri, Gifu, Jan. 20-21 (2009).
  108. “Nonlinear Rotational Spring with Tension for Stabilizing Electrostatically Driven Micromirror”, M. Sasaki, Kumagai, K. Hane, 2008 International Symposium on Micro-NanoMechatronics and Human Science, SA-2: Actuators (2008. 11. 8, Nagoya, Japan).
  109. “Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device” T. Aonuma, Kumagai, M. Sasaki, M. Tabata, K. Hane, the 2008 International Conference on Solid State Devices and Materials (SSDM 2008), Tsukuba, Sep. 23-26 (2008).
  110. “Electrostatic Nano-placement of a Single Nanoparticle by Charge-enhanced Protein Cage” S. Yoshii, A. Kadotani, K. Nishio, Kumagai, I. Yamashita, 2007 Materials Research Society Fall meeting, Boston, USA, (2007)
  111. “Aligned Growth of Carbon Nanotube using Protein Supramolecule” Kumagai, T. Ono, R. Tsukamoto, S. Yoshii, I. Yamashita, American Vacuum Society 54th International Symposium & Exhibition, Seattle, USA, (2007)
  112. “Fabrication of single electron transistor using cage-shaped protein supramolecule” Kumagai, S. Yoshii, N. Matsukawa, R. Tsukamoto, K. Nishio, I. Yamashita the 2007 International Conference on Solid State Devices and Materials (SSDM 2007), Tsukuba, Sep. 18-21 (2007).
  113. “Floating Gate MOS Capacitor with High-Density Nanodots Array Produced by Protein Supramolecule” K. Yamada, S. Yoshii, Kumagai, A. Miura, Y. Uraoka, T. Fuyuki, I. Yamashita the 2007 International Conference on Solid State Devices and Materials (SSDM 2007), Tsukuba, Sep. 18-21 (2007).
  114. “Novel process for single electron transistor using cage-shaped protein ferritin” Kumagai, S. Yoshii, N. Matsukawa, R. Tsukamoto, K. Nishio, I. Yamashita 26th Electronic Materials Symposium (EMS-26), 2007, Shiga, Japan
  115. “Synthesis and nano-placement of nanoparticle using cage-shaped protein” Kumagai, S. Yoshii, K. Yamada, K. Nishio, N. Matsukawa, K. Iwahori, I. Yamashita, American Physics Society, March Meeting 2007, Denver, USA
  116. “High-Density Floating Nanodots Memory Produced By Cage-Shaped Protein” K. Yamada, S. Yoshii, Kumagai, A. Miura, Y. Uraoka, T. Fuyuki and I. Yamashita, the 2006 International Conference on Solid State Devices and Materials (SSDM 2006), Yokohama, Sep. 12-15 (2006).
  117. “MOS capacitor memory with embedded inorganic cores being synthesized and arrayed by protein supramolecule” K. Yamada, S. Yoshii, Kumagai, I. Yamashita 25th Electronic Materials Symposium (EMS-25), 2006, Shizuoka, Japan
  118. “Single ferritin molecule placement on silicon substrate using electrostatic interaction in solution”, Kumagai, S. Yoshii, K. Yamada, I. Fujiwara, N. Matsukawa, I. Yamashita, International Symposium on Surface Science and Nanotechnology (ISSS-4), Omiya, Nov. 14-17 (2005).
  119. “Fabrication of high density nanoparticles on Si substrate using cage-shaped proteins” K. Yamada, S. Yoshii, Kumagai, I. Fujiwara, K. Nishio, N. Matsukawa, I. Yamashita 24th Electronic Materials Symposium (EMS-24), 2005, Ehime, Japan
  120. “Nano-patterning of Vapor-deposited Aminosilane Film using EB Lithography for Ferritin Protein Adsorption” Kumagai, S. Yoshii, K. Yamada, I. Fujiwara, N. Matsukawa, I. Yamashita, 22nd Conference of Photopolymer Science and Technology Conference, The International Symposium 2005 Materials & Processes for Advanced Microlithography and Nanotechnology, Chiba University, Japan
  121. “Highly Anisotropic and Corrosion-less PtMn Etching using Negative Ions in Pulse-Time-Modulated Chlorine Plasma”, Kumagai, T. Shiraiwa and S. Samukawa, the 2003 International Conference on Solid State Devices and Materials (SSDM 2003), Tokyo, Sep. 16-18 (2003).
  122. “Density and Temperature of Metastable Cl+ Ions in Time-modulated ICP Measured by Time Resolved LIF”, Kumagai, M. Sasaki, M. Koyanagi, K. Hane, 196th Electrochemical Society Meeting, Honolulu, USA, Oct. 17-22 (1999).

【国内学会発表】

招待講演　8件

  1. “Plasma-on-Chip: A microdevice for direct plasma-irradiation to cultured cells“, Shinya Kumagai, 第31回日本MRS年次大会H-I13-003, 2021年12月13日, パシフィコ横浜
  2. “プラズマオンチップ”, 熊谷慎也，小林未明，友田紀一郎，呉準席，清水鉄司，佐々木実，第68回 応用物理学会春季学術講演会, 19p-Z17-1, Online, 2021年3月16-19日.
  3. “Development of  plasma-on-chip:  Plasma  treatment  for  individual  cells cultured in media”, S. Kumagai, C.-Y. Yao, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, 2018年第79回応用物理学会秋季学術講演会、 18-21, 名古屋国際会議場
  4. “バイオナノプロセスのMEMS応用”, 熊谷慎也、山下一郎、浦岡行治、佐々木実　第61回応用物理学会春季学術講演会　青山学院大学　相模原キャンパス　2014年3月18日
  5. “バイオナノ加工技術のMEMS応用”, 熊谷慎也　日本真空学会　2月研究例会　名古屋大学　2013年2月5日
  6. “レジストのスプレー成膜と斜め露光を用いた立体加工”, 熊谷慎也, 佐々木実, レーザー学会学術講演会第32回年次大会, 仙台, 2012年1月30日–2月1日
  7. 【技術賞受賞記念講演】 “生体分子を用いた新しいナノ構造作製方法　―バイオナノプロセス―”,　熊谷慎也　山下一郎　第27回表面科学講演大会（2007）.
  8. 【講演奨励賞受賞記念講演】”静電相互作用による単一フェリチンタンパク質分子配置”, 熊谷慎也, 吉井重雄, 山田聖人, 山下一郎　第67回応用物理学会学術講演会 (2006)

一般講演 76件

  1. “高効率なプラズマ物質導入のための細胞膜相状態の測定”, 安東優人, 北崎竜也, 熊谷慎也, 2022年 第83回 応用物理学会秋季学術講演会, 20a-P05-7, 2022年9月20-23日.
  2. “大気圧プラズマによる細胞膜形状変化と遺伝子導入の相関”, 北崎竜也、小林未明、朝日通雄、熊谷慎也、2022年第69回応用物理学会春季学術講演会, [25p-E105-3], 2022年3月22日～26日.
  3. ”筋芽細胞C2C12の分化に対する大気圧プラズマの効果”, 熊谷慎也、牧野克敏、日比滉大、 第39回プラズマプロセシング研究会／第34回プラズマ材料科学シンポジウム, 2022年1月24～26日、オンライン
  4. “貫通孔上に展開した脂質二重膜へのプラズマ照射”, 安東優人, 熊谷慎也, 2021年 第82回 応用物理学会秋季学術講演会, 13p-N107-8, Online, 2021年9月10-13日.
  5. “高効率物質導入に向けたプラズマが与える細胞膜への影響の評価”, 北崎竜也, 熊谷慎也, 2021年 第82回 応用物理学会秋季学術講演会, 13p-N107-9, Online, 2021年9月10-13日.
  6. “高効率遺伝子導入に向けた細胞膜上の大気圧プラズマ誘起微細孔の評価”，北崎竜也，熊谷慎也，第81回 応用物理学会秋季学術講演回, 11a-Z12-6, Online, 2020年9月8-11日.
  7. “一細胞遺伝子導入に向けた非熱平衡大気圧プラズマを用いた物質導入効率の改善”, 保母 温季、小林 未明、熊谷 慎也, 2019年 第80回 応用物理学会秋季学術講演会, 19p-PB9-20, 2019年9月18-21日.
  8. “静電動作ねじり振動型非冷却赤外線センサ”, 畠垣 知弥、熊谷 慎也、佐々木 実, 2018年　第79回 応答物理学会秋季学術講演会, 名古屋国際会議場, 2018年9月18-21日
  9. “マイクロ流路における液中プラズマの放電特性”, 木野 裕也、熊谷 慎也、太田 貴之, 2018年　第79回 応答物理学会秋季学術講演会, 名古屋国際会議場, 2018年9月18-21日
  10. “大気圧プラズマジェットによって生成されるOHラジカルの液体中での可視化”, 石川 孝一、佐々木 実、熊谷 慎也, 第65回応用物理学会学術講演会、 17-20 (2018),
  11. “サンプル搬送能を持つプラズマ処理デバイス”, 柄﨑克樹, 熊谷慎也, 佐々木実, 第78回秋季応用物理学会学術講演会　福岡国際会議場・福岡国際センター 2017年9月6日
  12. “金属ナノ触媒を利用した非晶質シリコン薄膜の結晶化とデバイス応用”, 浦岡行治, 熊谷慎也, 山下一郎, 第78回秋季応用物理学会学術講演会　福岡国際会議場・福岡国際センター 2017年9月6日
  13. “Analyzing Activities of L929 Cells Irradiated with An Atmospheric Pressure Plasma”, S. Kojima, M. Kobayashi, M. Sasaki, Kumagai, 第64回春季応用物理学学術講演会 パシフィコ横浜　2017年3月16日
  14. “ウェアラブルセンサによる着席状態での呼吸計測”, K. Suburata, 寺澤 槙恵, 熊谷慎也, 佐々木 実 第64回春季応用物理学学術講演会 パシフィコ横浜　2017年3月16日
  15. “フォトリソグラフィとUVキュア処理によるナノギャップ電極アレイ形成”, 粂内 真子, 熊谷慎也, 趙 亨峻, 近藤 博基, 石川 健治, 堀 勝, 佐々木 実, 第77回応用物理学会秋季学術講演会 朱鷺メッセ　2016年9 月14日
  16. “Modification of Plasma-on-Chip Device for Stable Plasma treatment of Cells”, T. Okada, Y. Nakanishi, M. Kobayashi, T. Shimizu, M. Sasaki, Kumagai, 第77回応用物理学会秋季学術講演会 朱鷺メッセ　2016年9 月14日
  17. “低温大気圧プラズマを照射したNIH3T3細胞の遺伝子発現解析”, 戸梶秀人, 小林未明, 熊谷慎也, 谷原正夫　第77回応用物理学会秋季学術講演会 朱鷺メッセ　2016年9 月13日
  18. “Measurement of Reactive Species for the Development of Plasma-on-Chip”, J.-S. Oh, S. Kojima, A. Hatta, M. Sasaki, Kumagai, 第63回応用物理学会春季学術講演会 東工大 2016年3月21日
  19. “Plasma-on-Chip for Treatment of Individual Cells Cultured in Medium”, C.-H. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, Kumagai第76回応用物理学会秋季学術講演会 名古屋国際会議場 2015年9月3日
  20. “プラズマ オン チップの開発：気液界面を利用した１細胞へのプラズマ照射”, C.-Y. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Kobayashi, Kumagai, 第62回　応用物理学会　春季学術講演会 2015年3月15日
  21. “MEMS大気圧プラズマ光源の省電力化”, 佐藤龍仁, 熊谷慎也, 堀勝, 佐々木実　第61回応用物理学会春季学術講演会　青山学院大学　相模原キャンパス　2014年3月19日
  22. “水リフトオフ法によるPb(Zr,Ti)O3薄膜のサブミクロンパターニング”, 丹羽貴大, 中西一浩, 熊谷慎也, 川江健, 森本章治, 佐々木 実　第61回応用物理学会春季学術講演会　青山学院大学　相模原キャンパス　2014年3月17日
  23. “光電池垂直壁を介した配線による昇圧とマイクロミラーの静電駆動” 山本太一, 久保裕慎, 熊谷慎也, 佐々木 実　第74回応用物理学会学術秋季学術講演会　同志社大学　京田辺キャンパス　2013年9月18日
  24. “Niフェリチンを用いたSi薄膜カンチレバー振動子の均一結晶化”, 冨川崇, 熊谷慎也, 山下一郎, 浦岡行治, 佐々木実 第74回応用物理学会学術秋季学術講演会　同志社大学　京田辺キャンパス　2013年9月17日
  25. “着衣可能な容量型呼吸センサ” S. K. Kumar, 熊谷慎也, 佐々木実　第60回応用物理学会学術講演会　2013年3月27-30日
  26. “CO2ガスセンサのための波長選択赤外光源” 澤田貴裕, 熊谷慎也, 佐々木実　第60回応用物理学会学術講演会　2013年3月27-30日
  27. “Ni フェリチンを用いたSi 薄膜振動子の高効率化”, 冨川崇, 熊谷慎也, 山下一郎, 浦岡行治, 佐々木実　第60回　応用物理学会学術講演会 2013年3月27-30日
  28. “可搬マイクロプラズマ光源システム”, 松山弘樹，熊谷慎也，竹田圭吾，海老塚昇，堀　　勝，佐々木実, 第73回応用物理学会学術講演会, 愛媛大学・松山大学, 2012年9月11日–14日
  29. “ミリサイズ赤外線集光レンズとSi光電池との集積化”, 青沼拓郎, 熊谷慎也, 佐々木実, 第59回応用物理学関係連合講演会, 早稲田大学, 2012年3月15日–18日
  30. “マイクロミラー用薄膜トーションバーにおけるハードスプリング効果の評価”, 小川翔平, 熊谷慎也, 佐々木実, 第59回応用物理学関係連合講演会, 早稲田大学, 2012年3月15日–18日
  31. “浮遊電極の一部がガス流路内にある誘導結合型マイクロプラズマ源”, 佐藤龍仁, 熊谷慎也, 堀勝, 佐々木実, 第59回応用物理学関係連合講演会, 早稲田大学, 2012年3月15日–18日
  32. “Si 光電池と集積したmm サイズ赤外線集光レンズ”, 青沼拓朗, 熊谷慎也, 佐々木実, 第28回「センサ・マイクロマシンと応用システム」シンポジウム, タワーホール船堀, 東京, 2011
  33. “スパイラルコイル型マイクロプラズマ源に導入した浮遊電極の特性”, 浅野博敬, 熊谷慎也, 堀勝, 佐々木実, 第72回応用物理学会学術講演会, 山形, 2011
  34. “Niフェリチンを用いた金属誘起横方向結晶成長によるSi薄膜機械特性の向上”, 村瀬弘, 宮地修輔, 熊谷慎也, 山下一郎, 浦岡行治, 佐々木実, 第72回応用物理学会学術講演会, 山形, 2011
  35. “UVキュア処理レジストのアッシング特性”, 冨川崇, 岩本拓也, 熊谷慎也, 佐々木実, 第72回応用物理学会学術講演会, 山形, 2011
  36. “Niフェリチンを用いたSiの薄膜結晶化によるMEMSデバイス特性の向上”, 宮地修輔, 熊谷慎也, 山下一郎, 浦岡行治, 佐々木実, 第72回応用物理学会学術講演会, 山形, 2011
  37. “浮遊電極を導入した平板型マイクロプラズマ源”, 松山弘樹, 熊谷慎也, 堀勝, 佐々木実第72回応用物理学会学術講演会, 山形, 2011
  38. “UVキュアによるレジスト硬化を利用した多段階立体構造のエッチング加工”, 熊谷慎也, 疋田晃義, 岩本拓也, 佐々木 実, 第58回応用物理学関係連合講演会, 2011
  39. “傍熱型波長選択プラズモニック赤外光源”, 桝野雄矢, 澤田貴裕, 熊谷慎也, 佐々木 実, 第58回応用物理学関係連合講演会, 2011
  40. “3次元立体構造上にスプレー塗布されるレジスト膜厚の均一化”, 熊谷慎也, 福田直也, 田嶋久義, 佐々木 実, 第58回応用物理学関係連合講演会, 2011
  41. “スパイラルコイル型マイクロICPに導入した浮遊電極による点火特性”, 浅野博敬, 熊谷慎也, 佐々木実, 第58回応用物理学関係連合講演会, 2011
  42. “マイクロミラー用薄膜トーションバーの精密計測とハードスプリング効果に関する考察”, 小川翔平, 熊谷慎也, 佐々木実, 日本機械学会　東海支部　第60期　総会・講演会, 豊橋技術科学大学, 2011
  43. “Absorbent liquid immersion angled exposure for patterning 3D samples with vertical side walls”, M. Sasaki, H. Kubo, Kumagai, 第27回「センサ・マイクロマシンと応用システム」シンポジウム, くにびきメッセ、島根, 2010
  44. “スプレーコーティングの気流解析と膜厚分布均一化”, 佐々木実, 田嶋久義, 福田直也, 熊谷慎也, 第27回「センサ・マイクロマシンと応用システム」シンポジウム, くにびきメッセ、島根, 2010
  45. “MEMS化に適した大気圧プラズマ光源”, 松山弘樹, 熊谷慎也, 堀勝, 佐々木実, 第71回秋季 応用物理学会学術講演会, 長崎大学
  46. “MEMS 用Si 薄膜材料の内部応力増強に向けた Ni フェリチンを用いた金属誘起横方向結晶成長”，熊谷慎也，宮地修輔，山下一郎，浦岡行治，佐々木実，日本機械学会 2010年度年次大会，名古屋工業大学
  47. “高輝度大気圧マイクロプラズマ” 浅野博敬, 佐々木実，熊谷慎也, 日本機械学会 2010年度年次大会，名古屋工業大学
  48. “レジストのスプレー成膜におけるアパーチャの効果”, 福田直也, 田嶋久義, 熊谷慎也, 佐々木実, 日本機械学会 2010年度年次大会，名古屋工業大学
  49. “Niフェリチンを用いた金属誘起横方向結晶成長による薄膜内応力の増強”, 宮地修輔, 熊谷慎也,　山下一郎, 浦岡行治, 佐々木実, 第57回応用物理学関係連合講演会(2010)
  50. “ギャップクロージング型静電マイクロミラーのマクロモデルによるpull-in 現象解析,味元良一,沈 規一, 熊谷慎也, 佐々木 実, 日本機械学会 2009年度年次大会，岩手大学
  51. “スプレーコーティングの流れ解析”, 田嶋久義, 熊谷慎也, 佐々木実, 日本機械学会 2009年度年次大会，岩手大学
  52. “非接触エネルギー転送によるマイクロミラーの駆動”,熊谷慎也, 大西成宗, 佐々木実, 第70回応用物理学会学術講演会 (2009)
  53. “局所的大気圧プラズマ処理による波長選択赤外線ディテクタのコントラスト増強”, 桝野矢，田代孝二，堀　勝，熊谷慎也，佐々木実, 第70回応用物理学会学術講演会 (2009)
  54. “フェリチンタンパク質を利用した単電子トランジスタ構造の作製”, 熊谷慎也, 吉井重雄, 松川望, 塚本里加子, 西尾和晃, 山下一郎, 第68回応用物理学会学術講演会(2007)
  55. “密度制御バイオナノドット埋め込みMOSキャパシタの作製と電気特性評価”

山田聖人, 吉井重雄, 熊谷慎也，三浦篤志, 浦岡行治, 冬木隆, 山下一郎

第68回応用物理学会学術講演会(2007)

“電荷増強フェリチンによる大面積パターン上単一分子配置”, 吉井重雄, 門谷文子, 西尾和晃, 熊谷慎也，山下一郎, 第68回応用物理学会学術講演会(2007)

  1. “単一リステリアフェリチン分子の基板上配置制御”, 吉井重雄，熊谷慎也，山田聖人，山下一郎, 第54回応用物理学関係連合講演会(2007)
  2. “リステリアフェリチンによる高密度ナノドット配列埋め込みMOSキャパシタ”, 山田聖人，吉井重雄，熊谷慎也，三浦篤志, 浦岡行治, 冬木隆, 山下一郎, 第54回応用物理学関係連合講演会(2007)
  3. “生体分子を用いた固体表面上ナノ構造構築－バイオナノプロセス－”, 熊谷慎也　山下一郎、大阪大学コンベンションセンター, 日本表面科学会　第26回表面科学講演大会(2006)
  4. “単一フェリチン選択配置を用いたナノ構造の作製”, 齋藤卓, 久保田智広, 熊谷慎也，吉井重雄，山下一郎，寒川誠二, 第67回応用物理学会学術講演会(2006)
  5. “生体超分子を用いたナノ構造作製 －バイオナノプロセス－”, 熊谷慎也, 山下一郎 2006/7/10 神戸大学　瀧川記念学術交流会館, 日本真空協会関西支部＆日本表面科学会関西支部合同セミナー2006
  6. “静電相互作用による基板上への単一フェリチンタンパク質分子位置制御”, 熊谷慎也，吉井重雄，山田聖人，山下一郎, 第53回応用物理学関係連合講演会(2006)
  7. “ZnSe-フェリチンの基板上固定とZnOナノ粒子作製の検討”, 藤原勇，吉井重雄，山田聖人，熊谷慎也，西尾和晃，岩堀健治，山下一郎, 第66回応用物理学会学術講演会(2005)
  8. “アミノシラン表面修飾を用いたリステリアフェリチンの高密度ナノパターニング”, 山田聖人，吉井重雄，熊谷慎也，藤原勇，西尾和晃，山下一郎, 第66回応用物理学会学術講演会(2005)
  9. “蒸気法アミノ基修飾による単一フェリチンタンパク質粒子選択配置”, 熊谷慎也，吉井重雄，山田聖人，藤原勇，松川望，山下一郎, 第66回応用物理学会学術講演会(2005)
  10. “リステリアフェリチンを用いたナノ粒子のSi基板上1012/cm2高密度配置”, 山田聖人，吉井重雄，熊谷慎也，藤原勇，松川望，西尾和晃，山下一郎, 第52回応用物理学関係連合講演会(2005)
  11. “蒸気法アミノ基修飾による高密度フェリチンタンパク質選択配置”, 熊谷慎也，山田聖人，吉井重雄，藤原勇，松川望，山下一郎, 第52回応用物理学関係連合講演会(2005)
  12. “ポリイミド有機材料のエッチング加工特性”, 熊谷慎也，寒川誠二, 第65回応用物理学会学術講演会(2004)
  13. “パルス時間変調塩素プラズマによるMRAM材料エッチング”, 熊谷慎也，安藤厚博，寒川誠二, 第65回応用物理学会学術講演会(2004)
  14. “電子ビームインジェクションUHFプラズマの検討Ⅳ－EEDFの評価―”, 熊谷慎也　中野俊樹　田昭治　寒川誠二, 第50回応用物理学会関係連合講演会 (2003)
  15. “プローブ支援TRG―OESによるC2F4/CF3Iプラズマ中の電子エネルギー分布”, 中野俊樹　熊谷慎也　寒川誠二, 第50回応用物理学会関係連合講演会 (2003)
  16. “Electron emission enhancement by grating the upper metallic layer of surface electron emitter”

Magdy Mourad 熊谷慎也　寒川誠二, 第50回応用物理学会関係連合講演会 (2003)

  1. “電子ビームインジェクションUHFプラズマの検討Ⅲ－解離度の比較－”, 熊谷慎也　中野俊樹　寒川誠二, 第63回応用物理学会学術講演会　(2002)
  2. “Al, Si, SiO, Auデバイスによる電子放出”, Magdy Mourad　熊谷慎也　寒川誠二

第63回応用物理学会学術講演会　(2002)

  1. “電子ビームインジェクションUHFプラズマの検討（2）－解離度の推定－”, 熊谷慎也　坂本啓介　中野俊樹　寒川誠二, 第49回応用物理学会関係連合講演会 (2002)
  2. “電子ビームインジェクションUHFプラズマの検討（Ⅰ）”, 熊谷慎也　坂本啓介　寒川誠二, 第62回応用物理学会学術講演会　(2001)
  3. “誘導結合プラズマの真空紫外分光計測”, 中野俊樹　石川寧　熊谷慎也　寒川誠二, 第62回応用物理学会学術講演会 (2001)
  4. “タイムモジュレーションプラズマによる放射光ダメージの抑制”, 石川寧　沖川満　熊谷慎也　寒川誠二, 第62回応用物理学会学術講演会 (2001)
  5. “オンウェハーモニタリングによるコンタクトホール側壁導電性の測定”, 曽田真之介　熊谷慎也　小柳光正　寒川誠二, 第62回応用物理学会学術講演会 (2001)
  6. ”ICP中のバルク領域とウェハ近傍における塩素負イオン測定”, 熊谷慎也　佐々木実　小柳光正　羽根一博, 第48回応用物理学関係連合講演会 (2001)
  7. ”LIFとウェハプローブによる塩素プラズマの測定”, 熊谷慎也 佐々木実　小柳光正　羽根一博, 第61回応用物理学学術講演会 (2000)
  8. ”LIFによる時間変調ICP中の塩素分子イオンの測定”, 熊谷慎也　佐々木実　小柳光正　羽根一博, 第47回応用物理学関係連合講演会 (2000)
  9. ”LIFによる時間変調ICP中の準安定塩素イオン温度の測定”, 熊谷慎也　佐々木実　小柳光正　羽根一博, 第60回応用物理学学術講演会 (1999)
  10. ”LIFによるICP中の準安定塩素イオンの測定”, 熊谷慎也　佐々木実　羽根一博　小柳光正, 第46回応用物理学関係連合講演会 (1999)

Patents

【United States Patent】

11/878,691 Shinya Kumagai, Shigeo Yoshii, Nozomu Matsukawa, Ichiro Yamashita “METHOD FOR PRODUCING SINGLE ELECTRON SEMICONDUCTOR ELEMENT” Matsushita Electric Industrial Co., Ltd. Jul. 26 2007

12/320,556 Shigeo Yoshii, Kazuaki Nishio, Shinya Kumagai, Ichiro Yamashita “METHOD OF ARRANGING FERRITIN AND METHOD OF ARRANGING INORGANIC PARTICLES” Panasonic Corporation, Jan. 29 2009

【日本国内での登録特許】

特願2007-517670　WO07/091364

「単電子半導体素子の製造方法」

熊谷慎也、吉井重雄、松川望、山下一郎　松下電器産業株式会社、2006年11月28日

特願2008-542522　WO08/155872

「フェリチン配置方法および無機粒子配置方法」

吉井 重雄、西尾 和晃、熊谷 慎也、山下 一郎　パナソニック株式会社　2008年5月1日

特願2013-123525

「導電性ナノ繊維とコアシェル型微粒子を用いた熱電変換材料とその作製法」,

中村雅一、伊藤光洋、山下一郎、岡本尚文、小林未明、熊谷慎也

Grants

2023年　高橋産業経済研究財団　研究助成　「大気圧プラズマを用いた高効率遺伝子導入法の 開発」

2022年　日比科学技術振興財団　研究助成　「細胞への遺伝子導入技術の革新に向けた作用機序解明に関する研究」

2020年　上原記念生命科学財団　研究助成　「大気圧プラズマを用いた革新的遺伝子導入法の開発」

科研費　基盤研究(B)「プラズマ照射型シングルセル遺伝子導入マイクロデバイスの開発」　平成31年度—令和2年度

科研費　挑戦研究（萌芽）　「シングルセル遺伝子導入デバイス」　平成30年度—平成31年度

科研費　挑戦的萌芽研究　「プラズマ オン チップ」　平成26年度—平成27年度

科研費　若手研究（A）　「低環境負荷の液中セルフアセンブリプロセスでつくるマイクロ・ナノデバイス構造」　平成24－26年

科研費　挑戦的萌芽研究　「新しいリソグラフィーで側壁にデバイス構造をつくる」　平成24－25年

豊秋奨学会　「マイクロデバイスを用いた培養細胞への直接プラズマ照射による生体反応制御」　平成29-31年

豊田理研スカラシップ　「3次元MEMSに向けたレジストスプレーコーティング技術の開発」平成24年

Affiliated Academic Societies

Japan  Societiy of Applied Physics, IEEE，Japan  Society of Vacuum and Surface Science, Japan Society of Mechanical Engineers

Committee in Academic Society

2021年度　応用物理学会　大分類12 有機分子・バイオエレクトロニクス　代表

平成30年度　応用物理学会　有機分子・バイオエレクトロニクス分科会　庶務幹事